Acceleration insensitive encapsulated silicon microresonator

This paper presents the acceleration sensitivity and the resulting vibration-induced phase noise of an electrostatically coupled encapsulated silicon microresonator. External vibrations can produce phase noise in microresonators by generating time-varying stress in the resonant beams. A spring mounted resonator design that reduces the induced axial stress is presented here. Measurements and simulations show that the acceleration sensitivity and the vibrationinduced phase noise of this device can be reduced 1000 times smaller than that of the previously published silicon microresonator and 10 times smaller than the commercially used high end SC stress compensated -cut quartz resonator. © 2008 American Institute of Physics. DOI: 10.1063/1.3036536